Committees
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General Chair
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Prof. Hyeongtag Jeon
Hanyang Univ., Korea
Organizing Chair
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Prof. Jinsub Park
Hanyang Univ., Korea
1. Advanced Atomic Scale Thin Films
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Prof. Hyeongtag Jeon
Hanyang Univ., Korea
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Prof. Se Hun Kwon
Pusan Nat'l Univ., Korea
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Prof. Woo Hee Kim
Hanyang Univ., Korea
2. CMP & Post CMP Cleaning
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Prof. Jea-Gun Park
Hanyang Univ., Korea
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Prof. Tae-Dong Kim
Hannam Univ., Korea
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Prof. Sangwoo Lim
Yonsei Univ., Korea
3. Advanced Etching Technology
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Prof. Geun Young Yeom
Sungkyunkwan Univ., Korea
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Prof. Chin-Wook Chung
Hanyang Univ., Korea
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Prof. Haejune Lee
Pusan Nat'l Univ., Korea
4. Advanced Lithography
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Prof. Jong-Rak Park
Chosun Univ., Korea
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Research Fellow,
Jeonglim NamHanyang Univ., Korea
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Prof. Myung-Ki Kim
Korea Univ., Korea
5. Post Fabrication Technology and System Packaging
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Prof. Gu-Sung Kim
Kangnam Univ., Korea
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Prof. Changhwan Choi
Hanyang Univ., Korea
6. Frontier Metrology, Diagnosis, and Modeling for Nanoscale IC Integration and Emerging Device Process
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Prof. Tae-Hun Shim
Hanyang Univ., Korea
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Prof. Hyungtak Seo
Ajou Univ., Korea
7. Power Device
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Prof. Ho-jun Lee
Pusan Nat'l Univ., Korea
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Prof. Ogyun Seok
Kumoh Nat'l Inst. of Tech., Korea
8. Advanced Semiconductor Technology
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Prof. Jinsub Park
Hanyang Univ., Korea